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MEMS固体化学微推进阵列的微冲量测试技术
李创新, 余协正, 叶迎华, 沈瑞琪, 王成玲, 朱莹
南京理工大学 化工学院,江苏 南京 210094
摘要:
为了评价MEMS(Micro Electro Mechanical Systems)固体化学微推进阵列的推进性能,对其单元微冲量的精确测试显得尤为重要。在传统冲击摆的基础上,考虑微推进器推力和燃气射流冲击力之间的比例关系,设计了一套适用于MEMS固体化学微推进阵列单元微冲量的间接测试装置,并成功用于6×6规格(单元集成度为36个/cm2)微推进阵列的实际测试中。结果表明:典型实验数据下的待测微冲量为2.5442×10-4Ns,相对误差小于5%;实测8个单元的微冲量平均值为2.5574×10-4 N·s,相对偏差较小,具有很好的重复性。 
关键词:  微推进器  冲量  冲击摆  转动惯量 
DOI:
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基金项目:航天科技创新基金项目(CASC201105)。
Micro-Impulse Measurement of MEMS Solid Propellant Thruster Array
LI Chuang-xin, YU Xie-zheng, YE Ying-hua, SHEN Rui-qi, WANG Cheng-ling, ZHU Ying
School of Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Abstract:
In order to evaluate the propulsion performance of MEMS (Micro Electro Mechanical Systems) solid propellant thruster array, accurate measurement of unit micro-impulse is particularly important. Based on the traditional ballistic pendulum, as well as considering the relationship between the thrust and the impact of the gas jet, an indirect micro-impulse measuring device was designed. It was successfully used in the measurement of 6mm×6mm (integration density is 36/cm2) MEMS solid propellant thruster array. The results show that the unknown micro-impulse is 2.5442×10-4N·s under typical experimental datum, and the measurement accuracy meets the requirement of ballistic pendulum system in which the relative error is below 5%. The average impulse of 8test units is 2.5574×10-4 N·s with small relative deviation and good reproducibility. 
Key words:  Micro-thruster  Impulse  Ballistic pendulum  Moment of inertia

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